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Listing-id : 248596 
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118 Cedar Street,

Wellesley, Massachusetts,

United States 02481

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978-362-0510

Description :
Harvard’s Center for Nanoscale Systems(CNS) will install North America’s first High Speed Elionix ELS-HS50 electron beam lithography system. This will be the third Elionix electron beam lithography system installed into the Harvard CNS cleanroom.
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